发明名称 PROBE CARD
摘要 PURPOSE:To enhance the assembly properties of a card by arranging and supporting, in combination, a plurality of probe needle arranging and dividing sutructures corresponding to the electrodes of an object to be measured, thereby quickly and easily performing the accurate positioning of the probe needles. CONSTITUTION:For the electrode pads of each IC chip 1A arranged in a rectangular shape, a probe needle arranging and dividing structure 10 is constructed which is divided with the unit of each side. In the dividing structure 10, a inclined surface 12 is formed on a base member 11, and on the inclined surface 12 each tip of a plurality of probe needles 15 is accurately positioned, and arranged and fixed in a line. The grooves 12A of the surface 12 are formed along the supporting paths. For fixing the needles 15, the tops 16 of the needles 15 are arranged on a straight line with the electrode pitch and put in order on the same plane. As a result, the tips 16 are accurately positioned, so, if the flatness of the plane on which the dividing structure 10 is fixed is accurate, the assembly is enabled by the adjustment in the front, rear, left and right planes.
申请公布号 JPS63273328(A) 申请公布日期 1988.11.10
申请号 JP19870108096 申请日期 1987.05.01
申请人 TOKYO ELECTRON LTD 发明人 MURATA YASUMICHI
分类号 G01R31/26;G01R1/073;H01L21/66 主分类号 G01R31/26
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