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发明名称
VERFAHREN ZUM HERSTELLEN VON ELEKTRISCHEN KONTAKTEN HOHER AUSBEUTE AN AMORPHES N(PFEIL HOCH)+(PFEIL HOCH)-SILIZIUM
摘要
申请公布号
DE3812135(A1)
申请公布日期
1988.11.10
申请号
DE19883812135
申请日期
1988.04.12
申请人
GENERAL ELECTRIC CO., SCHENECTADY, N.Y., US
发明人
POSSIN, GEORGE EDWARD, SCHENECTADY, N.Y., US
分类号
H01L21/768;H01L21/285;H01L21/336;H01L23/52;H01L27/12;H01L29/78;H01L29/786;(IPC1-7):H01L21/90;H01L21/60;C23C14/14
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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