发明名称 |
Apparatus for retaining wafers. |
摘要 |
<p>A device for releaseably holding a workpiece includes a resilient collet which is pivotally attached to a base. Several fingers for holding the workpiece extend from the collet. The fingers are pivoted by actuating a member which elastically deforms the collet and causes the fingers to pivot from a position for engaging the workpiece to a position for releasing the workpiece and vice-versa. In one application, the base is a platen for supporting a wafer in a semiconductor processing system and a plurality of such platens and a corresponding plurality of the holding devices are arranged around the periphery of the disk. A counterweight ring is attached to the ring-shaped collet to counter-balance the moment generated by the centrifugal force of the wafer pressing against the fingers as the disk is rotated.</p> |
申请公布号 |
EP0290218(A2) |
申请公布日期 |
1988.11.09 |
申请号 |
EP19880303977 |
申请日期 |
1988.05.03 |
申请人 |
VARIAN ASSOCIATES, INC. |
发明人 |
MEARS, ERIC L.;HERTEL, RICHARD J.;BRICK, ROBERT V. |
分类号 |
H01J37/317;H01J37/20;H01L21/265;H01L21/677;H01L21/683;H01L21/687 |
主分类号 |
H01J37/317 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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