Apparatus for, and methods of, obtaining the movement of a substance to a substrate.

摘要

A beam of substantially coherent energy passes through an enclosure in a direction substantially parallel and contiguous to a substrate in the enclosure. A beam of non-coherent or substantially coherent energy is directed through the enclosure to the substrate in a direction transverse, but preferably perpendicular, to the substrate. Gases introduced into the enclosure combine to form a substance when subjected to the energy from the beams. This substance moves to the substrate and affects the substrate. For example, gaseous molecules such as silane (SiH4) and nitrous oxide (N2O) introduced into the enclosure in a direction substantially parallel and contiguous to the substrate combine to form silicon dioxide (SiO2). The unreacted gases may be removed from the enclosure after flowing past the substrate. A small amount of a donor gas of a particular one of the elements such as oxygen may be introduced into the enclosure in gaseous form, preferably in a direction substantially parallel and contiguous to the substrate and in a range of 0.1% - 5.0% by volume of the total volume of the gases. The amount of the oxygen may be sufficiently small so that there is no significant thermal reaction with the silane. The beam of substantially coherent light may be pulsed at a rate dependent upon the rate of flow of the element such as oxygen into the enclosure. By introducing the small amount of this element (e.g., oxygen) into the enclosure and pulsing the beam of substantially coherent light, the deposition rate of the substance on the substrate may be enhanced by as much as 30-40% and the quality (i.e. as indicated by its index of refraction) of the substance deposited on the substrate may be enhanced.