PRODUCTION OF SUPERHIGH DENSITY MEMORY

摘要

PURPOSE:To improve recording density by forming the superminute recess and projection parts on the surface of a substrate to be processed with a process where a conductive probe is set extremely close to the surface of the substrate in a reaction gas atmosphere or substrate formed with electron beam sensitive material and a tunnel current is supplied between said substrate and probe in a reaction gas atmosphere. CONSTITUTION:A conductive probe 5 is set extremely close to the surface of a substrate 2 or substrate 2 formed with electron beam sensitive material set in a reaction gas atmosphere. Then a tunnel current is supplied between the substrate 2 and the probe 5. The projection or recess parts are formed on the surface of the substrate 2 where the tunnel current passed through. Then the binarized signals are produced by the presence or absence of the recess or projection part. Thus a recording medium is obtained. Then the information high in density can be recorded.