| 摘要 |
PURPOSE:To prevent deviation between upper and lower substrates so that a uniform gap is obtd. by pressurizing a bag contg. a cell by a pressurizing device from above prior to vacuum packing and sealing the opening of the bag, then reducing a pressure in this state and executing vacuum packing. CONSTITUTION:After the cell 10 is put into the bag 6 by the pressurizing device 3, a bolt 16 is turned clockwise to tighten a pressing part 12 to prescribed torque after contact so that specified load is exerted to the cell 10. A cap of the vacuum device is closed in this state and after the pressure in the device is reduced, the opening of the bag 6 is welded. The bag 6 is pressurized by the force of the atm. pressure and the pressure is uniformly applied to the cell 10 when the atm. pressure is restored in the vacuum device while the reduced pressure state in the bag 6 is maintained. The collapsing rate of the bag 6 varies slightly at this time and since the contact force of the bag 6 with the cell 10 is different, deviations are generated in the upper and lower substrates 4 and 5 but the friction force of the substrates 4, 5 is larger than the deviating force and, therefore, the cell 10 is vacuum-packed without being deviated.
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