发明名称 |
Surface defect detection and confirmation system and method. |
摘要 |
<p>A surface inspection defect detection and confirmation technique in which a beam of radiation is directed at the surface to be inspected; the radiation scattered from the surface is separately sensed in the near-specular region indicative of a pit and in the far-specular region indicative of a flaw, the near-specular region signal and far-specular region signal are normalized, the near-specular component is discriminated, and the flaw signal is indicated as being a defect and not contamination when there is coincidence between the pit signal and flaw signal.</p> |
申请公布号 |
EP0290228(A2) |
申请公布日期 |
1988.11.09 |
申请号 |
EP19880304004 |
申请日期 |
1988.05.03 |
申请人 |
QC OPTICS INC |
发明人 |
QUACKENBOS, GEORGE S.;ORMSBY, JAY L.;NISHINE, KOICHI;CHASE, ERIC T.;BROUDE, SERGEY V. |
分类号 |
G01B11/30;G01N21/88;G01N21/94;G01N21/95 |
主分类号 |
G01B11/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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