摘要 |
PURPOSE:To decrease a substrate's occupation area required for one element so as to reduce its manufacturing cost, by interposing a buried electrode between an active layer and an optical waveguide layer and making an active current and a resonance frequency controlling current, which performs variable control of the resonance frequency by changing a refractive index of the optical waveguide layer on a diffraction grating, independently flow toward the buried electrode. CONSTITUTION:This device is composed of the following parts: a first electrode 1, a diffraction grating 2 which is formed on the first electrode 1 through a semiconductor substrate 7, an optical waveguide layer 3 which is formed on the diffraction grating 2, a buried electrode 4 which is formed on the optical waveguide layer 3 and made of a light transmissive material, an active layer 5 which is formed on the buried electrode 4, and a second electrode 6 which is formed on the active layer 5 through a semiconductor layer 8. An active current, which flows across the active layer 5 from the second electrode 6 to the buried electrode 4, is used to emit light from the active layer 5. A resonance frequency controlling current, which flows across the optical waveguide layer 3 formed on the diffraction grating 2 and flows from the first electrode 1 to the buried electrode 4, is used to change a refractive index of the optical waveguide layer 3 and perform variable control of the resonance frequency. |