| 摘要 |
PURPOSE:To obtain an optical thin film at high yield and at low cost by setting plural monitor substrates on a monitor substrate holding part provided to a monitor detection part every time a layer is vapor-deposited. CONSTITUTION:A multilayered optical film thickness controller consists of monitor substrates 1(1-1-1-n) made of white plate glass, etc., housings 50(50-1-50-n) for the monitor substrates, the monitor substrate holding part 51, a conveyance part 52 for the monitor substrates 1, a luminous flux supply part 53, and a light quantity detection part 54. Then the monitor substrates 1 are fixed to one substrate holding part 51 through the housings 50 every time a layer is vapor-deposited. Consequently, the plural monitor substrates 1 are set and positioned successively on one monitor substrate holding part 51 provided on a window 9 at the center part of a dome 8 through the housing 50, so even when the plural monitor substrates 1 are used, the optical path of reflected luminous flux 14 is easily held constant.
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