| 摘要 |
PURPOSE:To simultaneously measure an acceleration service life evaluating test and an alpha particle energy dependent characteristic, by providing a thickness detecting means of a radiation energy decelerating member piece, and a means for converting a radiation energy value from the detected thickness. CONSTITUTION:Between a semiconductor device to be tested 1 and an alpha-ray source 3 for radiating an alpha particle, a disk-like alpha particle energy decelerating material 4 which can be driven by a driving device 5 is placed, and also, a photomicrosensor 6 for detecting the thickness of the alpha particle energy decelerating material 4, and a film thickness detecting means 8 are provided. The alphaparticle energy decelerating material 4 is formed by decelerating member pieces t0-t7 of different thickness, and also, a hole for detecting the thickness of the decelerating member piece by the photomicrosensor 6 is provided. In this state, by a signal from a malfunction checking device 7, the film thickness is detected by a film thickness detecting device, an alpha particle energy value is converted by a tester means 9, and a frequency, an energy value, etc. are recorded.
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