| 摘要 |
<p>PURPOSE:To reduce the clean room maintenance cost by a method wherein a wafer cassette during wafer transfer is accommodated in a closed-type clean box composed of a hand, hand arresting platform, and cassette case. CONSTITUTION:A robot mechanism 12 is housed in a case 9, the robot mechanism 12 is provided with a robot arm 11, and a hand 14 is provided, removable from the robot arm 11, capable of accepting or discharging a wafer cassette 26. The hand 14 when separated from the robot arm 11 is arrested by a hand arresting platform 10 provided with an arresting mechanism 13. The hand arresting platform 10, hand 14, and a cassette case 25 opposite to the hand 14 constitute a closed-type clean box wherein the wafer cassette 26 is accommodated during transportation. The clean room maintenance cost is greatly reduced in this design.</p> |
