| 摘要 |
<p>PURPOSE:To render a sensor small in size and high in accuracy by a method wherein a light emitting and a photodetective element are connected through the intermediary of a diaphragm formed of the photoconductive material which is provided on and around a recessed part on a substrate so as to constitute a lightguide path. CONSTITUTION:A light emitting element 11 and a photodetector 12 are connected through a diaphragm 10 consisting of silicon oxide films 6 and 8 and a silicon nitride film 7 which are provided on and around a recessed part 3 so as to constitute a light guide path. Therefore the outputted light from the light emitting element 11 is detected by the photodetector 12 through the intermediary of the light guide path of the diaphragm 10 provided on and around the recessed part 3 on the substrate 1, where the deformation of the diaphragm 10 based on the state of pressure is detected by the photodetector 12 as the variation of the detected light volume, so that pressure is detected. By these processes, a sensor can be rendered to be small in size and high in accuracy.</p> |
