| 摘要 |
PURPOSE:To prevent photoelectric conversion elements from varying in their areas and shapes and to prevent scatterings in performances such as sensitivity and resolution every photoelectric conversion element and hence to enable the stable readout of image information, by forming a width of a transparent electrode so as to be smaller than that of each separate electrode on a side which is perpendicular to the direction in which the separate electrodes are disposed serially. CONSTITUTION:Many separate electrodes 12 are disposed serially on an insulating substrate 11, and a semiconductor thin film 15 and a transparent electrode 16 are laminated in order thereon to compose an adhesion type image sensor. In this image sensor, a width of said transparent electrode 16 is formed smaller than that of each separate electrode 12 on a side perpendicular to the direction in which said separate electrodes 12 are disposed serially. For example, each separate electrode 12 is formed so that both its ends is projected from both ends of the transparent electrode 16 above the electrode 12 in the degree of tolerance length on precision for mask position alignment upon the forming of the transparent common electrode 16. Even if positioning shift of the transparent common electrode 16 occurs due to the tolerance on the precision for mask position alignment, photoelectric conversion elements can be hence prevented from varying in their areas and shapes. |
