| 摘要 |
PURPOSE:To neutralize a primary ion beam for removing charge-up of an insulator sample while striving for high accuracy and high sensitivity by providing an ion-neutral atom converter between an objective and the sample and further providing an ion beam deflection electrode at the outlet of this converter. CONSTITUTION:When a primary ion beam having a minute diameter and focused by an objective 6 passes through an electron trap tube 8 acting as an ion-neutral atom comverter, the electrons filling its inside are trapped to become a neutralized neutral atom beam. Further, the then surviving ion beam is deflected by an ion beam deflecting electrode to so as to be prevented from proceeding to a sample 11 by an ion beam check plate 9. Thereby, only the neutral atom beam is radiated on the surface of the sample 11 so that the sample 11 is free from being charged-up even the sample 11 is an insulator. |
