| 摘要 |
PURPOSE:To obtain the titled alloy having high saturated magnetization, suitable magnetic anisotropy and low magnetic strain by specifying the compsn. consisting of Co and Hf, Zr, Ti, Y, etc., and Nb, Mo, W, Ta, Pt, Au, etc. CONSTITUTION:The alloy for a magnetic head consists of the compsn. expressed by CoXMYNZ (87<X<95, 2<Y<10, 0<Z<11 where M denotes the elements such as Hf, Zr, Ti, Y, etc., N denotes the elements such as Nb, Mo, W, Ta, Pt, Au, etc.). By using this alloy, a yoke and shield for a thin film magnetic recording head having the optimum properties such as high saturated magnetization, suitable magnetic anisotropy, resistance to wear and corrosion, etc., can be obtd. The alloy thin film device contg. said alloy compsn. can be obtd. by forming it on the surface of a substrate 3-5 mounted to a planetary 3-3 rotating around an axis 3-7 by using the source of sputtering 3-9 contg. plural alloy componental metals in a sputtering system 3-1.
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