Method and apparatus for depositing monomolecular layers on a substrate,申请号US19860934426-传众专利搜索

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发明名称	Method and apparatus for depositing monomolecular layers on a substrate
摘要
申请公布号	US4783348(A)	申请公布日期	1988.11.08
申请号	US19860934426	申请日期	1986.11.24
申请人	DALECO RESEARCH DEVELOPMENT	发明人	ALBRECHT, OTTO;BARTUR, MEIR;RODOV, VLADIMIR
分类号	B01J19/00;B05C3/00;B05C3/02;B05C3/12;B05D1/18;B05D1/20;B05D1/36;B05D7/00;C08J5/18;H01L21/312;(IPC1-7):B05D1/18	主分类号	B01J19/00
代理机构		代理人
主权项
地址

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