| 摘要 |
PURPOSE:To provide minute and complicated electrodes on an insulator without causing deformation or changes in properties of the insulator, by sandwiching an insulator between a first structure comprising electrodes on both sides of an insulator having through-holes and a second structure comprising electrodes provided on a substrate in a separate step, thereby producing an electrostatic latent image-forming device. CONSTITUTION:A thin dielectric 6 is sandwiched between a first structure A comprising second electrodes 4 and a third electrode 5, which has opening parts 5a, respectively on both sides of a base 3 having through-holes 3a and a second structure B comprising first electrodes 2 on a substrate 1, to produce an electrostatic latent image-forming device. To produce the first structure A, an electrode material is provided on both sides of the insulator layer (base) 3, a resist material is applied to the electrode material, exposure to light is performed by using a photo-mask having a desired pattern, and then etching is conducted to provide the second electrodes 4 having opening parts 4a and the third electrode 5 having the opening parts 5a. Etching is conducted by development, whereby the through-holes 3a having the same diameter as that of the opening parts 5a and an insulating part are provided. |
