| 摘要 |
PURPOSE:To achieve a higher X ray reflection factor, by forming a plurality of layer couples one upon another in such a manner that one layer thereof is made of boron nitride while the other layer thereof is made up of metal material. CONSTITUTION:A boron nitride layer 2 is formed on a substrate 1 by evaporation, a metal layer 3 is formed thereon and one set of layer couples 4 is made up of the boron nitride layer 2 and the metal layer 3. The layer couples thus obtained are laminated in a predetermined number in the same sequence to build a reflector. Incident X rays 11 are reflected with these layer couples of the reflector to form a reflected rays 12. Reflection factor of a BN-Re multi- layer film X rays reflector using Re for the metal layer is as shown in the table I and the reflection factor 18-72% can be obtained when the wavelength of incident X rays ranges from 1.5Angstrom to 200Angstrom . The layer of metal material is made of at least one or more kind of elements selected from among Mo, Ru, Pd, Ag, Hf, Ta, W, Re, Os, Ir, Pt and Au.
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