| 摘要 |
PURPOSE:To enable use of an inexpensive glass substrate by providing a high-frequency coil between opposite targets and a substrate. CONSTITUTION:A high-frequency coil is provided in front of the substrate 1 between the opposite targets 2, 2 and the substrate 1. A voltage is impressed to the targets 2, 2 facing each other by a DC power supply 5 and the target particles driven out of the targets by bringing a sputtering gas in a sputtering chamber into collision against the targets 2, 2 are deposited on the substrate 1. Plasma is generated in the space enclosed by the coil 3, by which the particles sputtered from the targets 2 and the atmosphere gas are efficiently ionized, when high-frequency electric power is applied to the high-frequency coil 3 by a high frequency power supply 4. The generated ions flow into the substrate 1 and the film is formed. The use of the inexpensive glass as the substrate is thereby enabled.
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