| 摘要 |
PURPOSE:To automate a lithograph mask management facility by providing such an arrangement that a central control device takes out a mask casing onto a traverse from a carrier in accordance with an input signal from a terminal device while recognizing a batch, and moves the traverse to a predetermined storage rack. CONSTITUTION:When a terminal device 6 requests the take-out of a mask casing 1, a central control device 7 moves a traverse 4 to a predetermined storage rack 2a to take out a predetermined mask casing 1. On the way of conveyance of the mask casing 1 to a carrier 3 by the traverse, a bar code reader 5 reads a bar code on the mask casing 1, and transmits thus read data to the central control device 7. The central control device moves the traverse to a predetermined carrier 3 and shifts the same onto the latter, and then the carrier 3 conveys the mask casing to a required position. On the contrary the above-mentioned steps are carried out in the reverse order when a mask casing is stored onto the storage rack 2a. With this arrangement, it is possible to automate the mask managing facility, to aim at enhancing the degree of cleanness and productivity. |
