摘要 |
PURPOSE:To execute calibration with high accuracy for picture processing by using a plate having the known and fixed thickness. CONSTITUTION:A picture processing subject 2 is held adjacently to a reference surface 5. Then a window 5 where the picture of the subject 2 includes a processing mark 3 and the centroid position of the mark 3 within the window 6 is calculated by the picture processing. The picture element coordinates of said centroid position are set at (X0, Y0). At the same time, a plate 4 (thickness: t) is held between the subject 2 and the surface 5. Then the centroid position (X1, Y1) of the mark 3 within the window 6 is calculated by the picture processing with the plate 4 held as it is between the subject 2 and the surface 5. The changes of coordinates (x1-x0, y1-y0) are produced in response to the thickness (t) of the plate 4.
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