| 摘要 |
<p>PURPOSE:To speed up a transport process by correcting the placing position for a plate piece to be accommodated in a storage by the combined action of an auxiliary mechanism mounted on an arm and a storing port at the time of placing a plate piece on the surface of the arm and carrying same in the storage. CONSTITUTION:An auxiliary mechanism 6 is movably provided on an arm 1 where a plate piece (semiconductor wafer) 2 is placed by a connecting pin 7a and fixed according to the plate piece 2. When the wafer 2 inserted in a storage 3 is placed on the arm 1 with a difference in position and the arm 1 is moved in the inserting direction, the wafer 2 is brought into contact with the wall of the storage 3 and pushed backward to be brought into contact with a pressing plate of a cushioning portion 11 of the auxiliary mechanism 6. The eccentricity of the wafer 2 is corrected by the interaction between the action of a spring of the pressing plate and the contact wall surface of the storage 3 and inserted in the storage 3. When pressure to the pressing plate continues without correction to move the pressing plate against the spring, the movement is detected by a sensor to work out a countermeasure.</p> |
