| 摘要 |
PURPOSE:To simplify the manufacture and further facilitate the control of the luminous efficiency of laser and the luminous position of light emitting mode characteristic by a method wherein an electrode and a control electrode in which driving current is injected are formed on the same plane. CONSTITUTION:A double hetero-junction structure 15 consisting of the lower clad layer 13, an active layer 12, and the upper clad layer 14 is formed on a substrate crystal 11, and P type and N type impurities are diffused and ion-implanted respectively to depths reaching at least the active layer 12 in parallel at fixed intervals in the longitudinal direction of the layer 14, resulting in the formation of a P type region 16 and an N type region 17 in the active layer 12 on both sides of a light emitting region 18 constituting the active layer. Metallic electrodes 19 and 20 are evaporated on respective regions, and a metallic stripe-form electrode 21 is provided as the control electrode between the P type region 16 and the N type region 17 of the layer 14. |
