| 摘要 |
PURPOSE:To improve a recording and reproducing efficiency by executing the flattening cavity part processing of a prescribed thickness and flattening the level difference of the photoresist occurred at an insulating layer on a thin film coil. CONSTITUTION:On an Ni-Zn ferrite-made magnetic base 1, a first insulating layer 2 by an SiO2 thin film is formed, and on it, a thin film coil 3 is patterned to a prescribed shape with a chemical etching, etc. Next, a second insulating layer 4 of the SiO2 thin film is formed, further, a photoresist 5 is coated, a shape is flattened, the unnecessary part of first and second insulating layers 2 and 4 is ion-beam-etched, an intermediate insulating layer is inclination-processed to an optimum angle, next, a magnetic cavity part insulating layer 6 is formed with an SiO2 thin film and a magnetic core 7 is formed with a Sendust thin film. Thus, since the insulating layer 4 formed on the thin film coil 3 is flattened and the intermediate insulating layer is processed to an optimum inclination angle, the magnetic core 7 does not generate unevenness, and formed with an inclination at a part from a magnetic cavity part 8 to the upper part of the thin film coil 3, and therefore, a magnetic flux easily flows in the magnetic core 7 and the deterioration of a magnetic permeability can be prevented.
|
