Method and device for producing (generating) a plasma

摘要

A device for producing a low-pressure plasma contains a microwave generator and a receptacle which can be sealed in a vacuum-tight manner. The gas which is required for the desired chemical reaction is introduced at a specific pressure into the receptacle. The microwaves produce a plasma in the gas which is present in the receptacle, which plasma enables the desired reaction. According to the invention, the receptacle is arranged in a cavity resonator into which the microwaves are fed. This results in a particularly uniform energy density in the interior of the receptacle.