| 摘要 |
PURPOSE:To increase the generation efficiency of secondary ions generated by the primary ion spattering and improve the detection limit by arranging a sample heating means in a state electrically insulated from a casing. CONSTITUTION:The electrons emitted from a primary ion source 1 are spattered and radiated to a sample 5 mounted on a sample bed 2, and the secondary ions thus emitted are extracted by a secondary ion extracting electrode 7. A heater lead wire 14 is arranged on the sample bed 2 and heated with a DC power supply 17. The sample bed 2 is electrically insulated from a casing 11 to keep the preset potential. When the sample 5 is heated, the generation efficiency of secondary ions is increased, and the detection limit is improved. The adsorption of the light element such as oxygen is reduced, and the detection limit of the light element analysis is improved.
|
