| 摘要 |
PURPOSE:To accurately detect a probing state by electrically connecting one terminal of a probing detector to a probe stylus contacted partly at the same potential as a wafer and the other terminal to a stage for holding the wafer. CONSTITUTION:A terminal 16 connected to a detecting and probe stylus 13a and a terminal 17 connected to a stage 6 in a probing detector 15 are connected through normal closure switches 18, 19 to earth and power sides. The terminal 17 connected to the stage 6 is connected through a logic circuit 20 to a probing discriminator 21. The discriminator 21 detects the probing when the terminals 16, 17 are conducted therebetween, notifies it to a tester 14 to open the switches 18, 19, and transmits a command for starting a test to the tester 14. A communication between the tester 14 and the electronic circuit of a pellet 2 is executed through a probe card 10, a probe stylus 13 group and pads 4 group.
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