| 摘要 |
PURPOSE:To eliminate the dispersion of energy and form an expanded sample image with high resolution with a simple device by providing an optical path having an electrostatic type energy sector and controlling the timing of gate pulses. CONSTITUTION:The secondary ions with various mass numbers are emitted from a sample 1 radiated with a primary ion beam and form an image on a channel plate 4 via an optical path formed with lenses 2, 3 and an electrostatic type energy sector 7. The gate voltage VG is applied to the channel plate 4, and an image of the specific ion species can be obtained with a simple device based on the required time of secondary ions running between the sample 1 and the channel plate 4. The secondary ions only in the preset width form the image via the operation of the energy sector, the deterioration of resolution due to the dispersion of energy is avoided, and the effect of the initial energy is reduced.
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