| 摘要 |
PURPOSE:To isolate propagation of vibration to a substance to be vibration- isolated through simple constitution, by a method wherein an electromagnetic actuator having the one supported to the substance to be vibration-isolated and the other supported to a base body is driven and controlled in response to a detecting signal to detect displacement of the substance to be vibration- isolated. CONSTITUTION:A second support bed 12 to support a substance 15 to be vibration-isolated is disposed to a first support bed 11, supported to a base body 10, with an electromagnetic actuator 13 therebetween. In response to a detecting signal from a displacement detector 16 situated to the first support table 11, the substance 15 to be vibration-isolated is controlled to float from the base body 10 through the working of a drive control circuit 14. In which case, the electromagnetic actuator 13 is driven and controlled to control a stator 13a and a rotor 13b of the second support table 12 so as to hold a specified distance therebetween. Thus, propagation of vibration of the base body 10 to the substance 15 to be vibration-isolated can be reliably isolated through a simple constitution. |
