| 摘要 |
PURPOSE:To obtain a film having a uniform distribution of compsn. by press- molding powder of plural kinds of metals and/or alloys so as to provide a prescribed distribution of compsn. and by using the resulting alloy target for sputtering having a prescribed plane distribution of compsn. CONSTITUTION:When powder of plural kinds of metals and/or alloys is press- molded in a mold to obtain an alloy target for forming a film having a prescribed compsn. such as Th25Fe75, the press molding is carried out so as to provide a distribution of compsn. in which the central part is Th25Fe75 and the Fe content increases gradually toward the periphery. Thus, an alloy target having a prescribed plane distribution of compsn. is obtd. By using the alloy target, a film having a uniform distribution of compsn. is obtd. |
