| 摘要 |
PURPOSE:To ensure favorable adhesion between a thick-film electrode paste and a substrate and attain higher reliability and higher yield, by composing the substrate of an alumina ceramic at least 99% in purity and providing a glaze layer between a controlling circuit part comprising a controlling IC and the substrate. CONSTITUTION:A glass paste is applied to an insulating substrate 1 formed of an alumina ceramic by printing, followed by firing to provide a mesa-form glaze layer 1a and a glaze layer 5. Next, a gold paste is applied in an appropriate pattern by printing, followed by firing to provide a thick-film electrode layer 7. Then, a controlling circuit part B is masked with a metallic mask 10 except a connecting part of the electrode layer 7 for a printing part A, and a heat generating resistor layer 2 and a thin-film electrode layer 3 are provided. Further, a protective layer 4 is provided on the thin-film electrode layer 3, and finally, a controlling IC 6 is adhered to the glaze layer 5 by die bonding, and is connected to the thickfilm electrode layer 7 by wire bonding 8, followed by covering thereof by a resin layer 9. |
