| 摘要 |
PURPOSE:To judge the irregularities on the cross section of a sample simply and reliably by specifying and detecting the line profile signal in the scanning region and estimating and displaying the cross section shape based on the signal in a scanning type electron microscope or the like. CONSTITUTION:The scanning line in the scanning region is specified by a cursor 40, and the profile wave-form 50 at its specific position is displayed by a line profile detecting circuit on the CRT display scope of a scanning type electron microscope, for example. The line profile detecting circuit is fed with the secondary electron emission signal from a sample and horizontal and vertical sweep signals from a scanning signal generating circuit and calculates the line profile. The signal of the line profile detecting circuit is calculated in a cross section displaying circuit, and the cross section shape 60 is displayed at the required position of a display. The cross section displaying circuit calculates the inclination angle of the edge section based on the preset irregular shape size information of the sample.
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