Method and apparatus for continuous throughput in a vacuum environment.

摘要

Disclosed is a method and apparatus for continuous introduction and exit of workpieces (10) into and out of a vacuum (30). A first seal (13) is provided between the atmosphere and a first pumping station (15). This seal comprises compliant members (44 & 45) positioned within cavities (42 & 43) in a plate (31) so that the pressure differential causes the members to push against the workpiece and the cavity wall to establish a rotating seal. A second seal (20) may also be provided between the first pumping station and the vacuum chamber. This seal includes compliant members (74 & 75) mounted within a series of differentially pumped cavities (72 & 73) and providing a low friction seal with the workpiece.