| 摘要 |
PURPOSE:To transmit a laser beam accurately and facilitate an accurate laser beam processing by a method wherein a plurality of laser beam transmitting parts are provided in a reflective mirror of the laser beam and the respective parts of the laser beam transmitted through the transmitting parts are detected by detecting plates and the outputs of thermosensors in the respective detecting plates are compared with each other to detect the position of the laser beam. CONSTITUTION:A laser beam 4 is reflected and transmitted by a mirror 1 and parts 40 of it are transmitted through transmitting parts 2 in the mirror 1 and absorbed by detecting plates 20 to raise the temperatures of the plates 20. The temperature rise of each detecting plate is detected by a thermosensor and converted into a sensor output. The temperatures of the respective detecting plates are measured and compared with each other to detect the position discrepancy of the laser beam 4. With this constitution, a power loss caused by the transmission can be reduced and the position of the laser beam can be detected accurately. |
