| 摘要 |
PURPOSE:To enable the high magnification detecting of a matter to be measured, by carrying/positioning the matter to be measured within the usable range of an optical system and using this optical system to picture the matter to be measured and displaying it on a TV monitor whenever a state of the matter to be measured is required to be detected. CONSTITUTION:A semiconductor wafer whose pre-alignment is finished is carried/ positioned on a measurement stage by a carrier arm 5. Whenever a state of a chip on measurement is required to be observed, the semiconductor wafer 8 on measurement is moved within a usable range of an optical system 6, and its position alignment to the optical system is performed on the basis of a predetermined reference point. Subsequently, light from a light source 9 is radiated on a surface of the semiconductor wafer 8 whose state is required to be observed. Since the image picturing by the use of a CCD camera 12 is occasionally hindered due to a dark field of vision, light sources 9 are installed on a plurality of positions, for example, on three positions. The light source 9 installed above perpendicularly to the semiconductor wafer 8 is used on a bright field of vision. In succession, a CCD camera is used to picture the surface of this semiconductor wafer 8 through a half mirror 10, and this pictured image is displayed on a TV monitor 11.
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