发明名称 TESTING DEVICE OF SEMICONDUCTOR ELEMENT
摘要 PURPOSE:To reduce human labor and to realize a continuous unmanned operation, by making the use of loader stockers changeable one by one into that of unloader stockers. CONSTITUTION:When a stocker 210, which belongs to a sort 1 in unloader stockers 22, is full of e.g., magazines 211 in which measured/sorted semiconductor elements are housed, a sort controlling part 16 is used to assign the other empty stocker, which functions as e.g., a loader stocker 213, to be changed into a stocker 307, which belongs to a sort 1 of the unloader stocker 22, according to preset procedures, and the magazines 211 in the sort 1 is housed in this stocker 307. When the unloader stocker 22 is full of the magazines, the magazines are drawn out by human labor. A magazine 308, in which semiconductor elements to be measured are housed, is set instead in the stocker 210, so that the stocker 210 is made to function as a sort F of a loader stocker 18. On this position, the use of the stocker, which first belongs to the unloader stockers 22, is assigned to be changed into the use of the loader stocker 18.
申请公布号 JPS63265439(A) 申请公布日期 1988.11.01
申请号 JP19870100668 申请日期 1987.04.23
申请人 TERU KYUSHU KK 发明人 IWAZU HARUO
分类号 H01L21/66;G01R31/26;G01R31/28 主分类号 H01L21/66
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