发明名称 |
Process and composition for purifying arsine, phosphine, ammonia, and inert gases to remove Lewis acid and oxidant impurities therefrom |
摘要 |
A process for purifying a gaseous mixture comprising arsine, phosphine, ammonia, and/or inert gases, to remove Lewis acid and/or oxidant impurities therefrom, comprising contacting the mixture with a scavenger including a support having associated therewith an anion which is effective to remove such impurities, such anion being selected from one or more members of the group consisting of: (i) carbanions whose corresponding protonated compounds have a pKa value of from about 22 to about 36; and (ii) anions formed by reaction of such carbanions with the primary component of the mixture.
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申请公布号 |
US4781900(A) |
申请公布日期 |
1988.11.01 |
申请号 |
US19880154917 |
申请日期 |
1988.02.11 |
申请人 |
ADVANCED TECHNOLOGY MATERIALS, INC. |
发明人 |
TOM, GLENN M.;BROWN, DUNCAN W. |
分类号 |
B01J20/32;C01B6/06;C01B21/04;C01B23/00;C01B25/06;(IPC1-7):B01D53/04 |
主分类号 |
B01J20/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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