| 摘要 |
PURPOSE:To stabilize the resistance of a welding section and the characteristics of a thin-film thermistor for a prolonged term by welding a Pt lead to an Au-Pt thick-film electrode film in the thin-film thermistor, coating the electrode film with glass and protecting the electrode film. CONSTITUTION:A pair of Au-Pt thick-film electrode films 2 are formed onto one surface of a plate-shaped alumina substrate 1, and an SiC resistor coating 3 is shaped onto one surface of the plate-shaped alumina substrate 1 and the Au-Pt thick-film electrode films 2 so as to be electrically connected to the Au-Pt electrode films 2 mutually. Pt leads 4 are welded to the Au-Pt thick-film electrode films 2, and one surface of a thin-film thermistor is coated with a glass material having a transition point of 670-750 deg.C and a thermal expansion coefficient of (60-80)X10<-7>/ deg.C. Accordingly, a resistance value is stabilized significantly for a prolonged term while excellent heat resistance resisting a high temperature of 600 deg.C can be provided.
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