| 摘要 |
<p>PURPOSE:To prevent resistor from deteriorating during its treatment and the like and make the adjustment of resistance applicable to diffused resistor by preparing an excision part in the course of a bridge thin film, thereby making a resistance value adjustable depending on its excision width. CONSTITUTION:Terminal thin films 2 are connected to both ends of a thin film resistor or diffused resistor 1 and a bridge thin film 3 short-circuiting between the terminal thin films 2 is formed. The terminal thin films 2 as well as the bridge thin film 3 are integrally formed with a good conductor aluminum film. The bridge thin film is extended and arranged along the side plane of the resistor 1. An excision part 5 for trimming use is provided in the course of the bridge thin film 3 and a resistance value of the resistor 1 which is inserted in a circuit varies continuously depending on a width of the excision part 5. In this way, the circuit resistance value due to resistor 1 is continuously adjusted and then, its trimming is different from one which is obtained by excising the resistor 1 directly. As it is obtained by excising the bridge thin film 3 of Al, no heat is added to a semiconductor with its cutting treatment and then, there is no deterioration due to trimming in the semiconductor.</p> |
