| 摘要 |
PURPOSE:To detect whether an obstacle is in touch with a test head or not and so to improve working safety, by installing a pressure detector on a rear surface of the test head and using a detection signal of this pressure detector to stop the operation of the test head. CONSTITUTION:A test head 4 is mounted rotatable around a rotary axis where a prober body is mounted. When the test head is rotated and an obstacle is in touch with a tape type pressure switch 8, a signal is transferred from the tape type pressure switch 8 to a driving system CPU 12 which controls the drive of the test head 4. The driving system CPU 12 receives this signal and next outputs an emergency stop signal to an air valve 13 which drives an air cylinder. When the emergency stop signal is inputted to the air valve 13, an switching operation of the valve is performed to interrupt the supply of air into the air cylinder 6 and simultaneously to stop the rotation of the test head 4. Accordingly, safety can be improved without a dead angle in measurement by directly detecting whether the obstacle is in touch with the test head or not.
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