| 摘要 |
PURPOSE:To obtain an ion emitting source which is small-sized and lightweight and easy to integrate with a simple structure by providing an accelerating electrode formed via an insulating layer with an ion emitting port on an ion conductor layer formed on an ion feeding source. CONSTITUTION:An ion feeding source 2, an ion conductor layer 3 formed on this ion feeding source 2, and an accelerating electrode 5 formed via an insulating layer 4 provided with an ion emitting port 6 on this ion conductor layer 3 are provided. The voltage is applied across the ion feeding source 2 and the accelerating electrode 5 to keep the ion feeding source 2 side at the high potential for the positive ion emission, and vice versa for the negative ion emission, the ions fed from the ion feeding source 2 are emitted from the ion emitting port 6 through the ion conductor layer 3, the emitted ions are accelerated by the accelerating electrode 5. A small-sized and lightweight ion beam source can be constituted with a simple structure.
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