| 摘要 |
PURPOSE:To upgrade productivity by radiating laser on an oxide superconductor sintered material so as to vaporize the oxide superconductor so that an oxide superconductor thin film is formed on a substrate. CONSTITUTION:A sintered material (target) 2 of auxiliarily fired oxide superconductor powder is disposed on a supporting jig 18, and vacuum exhaustion of a container is fully performed, and next a mixed gas of high purity oxygen and high purity alkali is sealed in a container. After the gas is sealed-in until a prescribed pressure is obtained, a high-frequency voltage is applied to form a plasmatic state in a quartz glass tube 8 which is installed in the container, and YAG laser 4 is radiated on the target 2. Accordingly the target 2 is immediately vaporized, and vaporizing atoms and molecules react in a plasma region in the quartz tube 8 and are heaped on a saphire substrate in order to form an oxide superconductor thin film. This oxide superconductive thin film of good quality can be thus formed and also a film formation speed and productivity are upgraded in this film.
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