发明名称 HIGH-SPEED PARTIALLY PLATING DEVICE
摘要 PURPOSE:To reduce the dispersion of a plating thickness as well as to improve plating unevenness, plating burning and so on by a method wherein the form of anodes is formed into a form coincided with the form of the surface to be plated of a material to be plated. CONSTITUTION:The title device is provided with plating solution injection nozzles 1 consisting of heat-resisting vinyl chloride, screw parts 2 and 5, which are provided on each nozzle 1 and are used for attaching and detaching anodes and adjusting the anode-cathode distance, anode surfaces 4, which are provided on the upper surfaces of blocks (anode supporting parts) 3 and consist of a stainless plate, and so on. The device has such a structure that the anodes 4 are formed into a form coincided with the form of the surface to be plated of a material to be plated and can be attached and detached to and from the nozzles 1, and moreover, the anodes 4 are movably designed to be able to change the anode-cathode distance. Thereby, such poor appearance as plating unevenness and plating burning are improved off and a plating of stable quality can be obtained.
申请公布号 JPS63263752(A) 申请公布日期 1988.10.31
申请号 JP19870100512 申请日期 1987.04.22
申请人 NEC CORP 发明人 OKU TOMOICHI;TSUKIDE EIJI
分类号 H01L23/50 主分类号 H01L23/50
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