| 摘要 |
PURPOSE:To prepare a thin-film having a high superconducting critical temperature (T.c) and high quality by depositing a specified oxide thin-film onto a substrate and irradiating the surface with laser beams. CONSTITUTION:When an oxide superconductor in formula I is deposited onto a substrate through vacuum deposition or sputtering and a thin-film is formed, the Tc of the oxide superconducting thin-film is improved when a laser is applied under conditions such as timing, energy density, a pulse layer, the intervals of irradiation, the atmosphere of irradiation, etc., corresponding to the kind, composition, film thickness, deposition rate, etc., of the oxide thin-film. The temperature of the substrate need not be elevated in order to improve Tc by the irradiation of the laser, and the oxide superconducting thin-film, oxygen therein is not separated and eliminated, superconductivity of which is not deteriorated, a composition ratio of which is not changed by the evaporation of elements contained and which has high quality and the high Tc, is prepared. M1 in formula represents a group III metal and M2 a group II metal. |
