WAFER TRANSFER MECHANISM

摘要

PURPOSE:To stabilize suction, to improve the accuracy of positioning and to reinforce a suction arm by linearly transferring and delivering a wafer to a cartridge by a suction section on a moving block. CONSTITUTION:A moving block 17b and a rotating shaft 14 are mounted onto a base plate 18, and a suction arm 13 and a rotating arm 15 are fixed respectively at the upper and lower edges of the shaft 14. A suction section 12 including the arcuate positioning stepped section 12e of approximately a quarter of the outer circumferential circle of a wafer 3 is set up at the nose of the arm 13, and the wafer 3 is sucked under a vacuum under the state in which the side face of the outer circumference of the wafer 3 is brought into contact with the stepped section 12e when the center of the wafer 3 coincides with the center of revolution. A cam roller 16b is mounted at the nose of the arm 15 and a cam groove 16a into which the roller 16b is fitted to the plate 18. The shape of the groove 16a is shaped in a curve in which the direction of the arm 13 is made parallel with the direction of transferring at the position of delivery of the wafer 3 with a cartridge 2 and the arm 13 is turned in the rectangular direction that an arm 6 can be retreated at the position of delivery of the wafer 3 with the transfer arm 6 changing the direction of transfer of the wafer 3 at a right angle.