FIXTURE MECHANISM FOR PLANAR ELEMENT

摘要

PURPOSE:To enable the overall surface of planar element to evenly and closely adhere to a holding base by a method wherein a frame member is provided to push on the peripheral part of planar element to a holding base along the overall periphery of contour shape of a planar element. CONSTITUTION:Respective mounting parts of a plurality of semiconductor wafers 5 within a rotary disc are provided with fixture mechanism B composed of a recession 6b, a platen 7 (holding base) holding semiconductor wafers 5 mounted on the recession 6b from rear side and an annular frame member 8 movably inserted into the recession 6b to push on the peripheral part of semiconductor wafers 5 to the platen 7. Through these procedures, e.g. the portion formed into an orientation flat can be prevented from floating over the platen 7 due to running off frame member 8 so that the rear of semiconductor wafers 5 may evenly and closely adhere to overall surface of platen 7.