| 摘要 |
PURPOSE:To enable the simple setting of an appropriate margin, by determining images of patterns in a plurality of directions of two image data and by using the results of this determination to conduct coding and then comparison. CONSTITUTION:First and second specified regions of a sample are inputted through first and second image input means 6 and 7 respectively. First and second length-measuring circuits 8 and 9 determine the continuity of patterns of image data in a plurality of directions, e.g. sixteen directions, respectively. A comparator circuit 10 determines whether the numbers of pieces in continuity of these data in the sixteen directions are in accord or not within a specified error. In this determination, the continuity, width or others of the patterns in the sixteen directions is coded and then compared, so as to determine whether the image data are in accord or not.
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