摘要 |
PURPOSE:To produce a thin oxide film having a uniform compsn. and a uniform arbitrary thickness by forming a film of an org. substance having adsorbed metal ions on the surface of water in a water tank, transferring the film to the surface of a fixed substrate and heat treating it in the presence of oxygen. CONSTITUTION:A film of one or more kinds of org. substances having adsorbed metal ions or gel of them or forming ion pairs with the metal ions is formed on the surface of water in one or more water tanks. The metal ions are ions of at least M1, M2 and M3 (M1 is one or more among B, Al, Ga, In, Tl, Sc, Y, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb and Lu, M2 is one or more among Be, Mg, Ca, Sr, Ba, Ra, Sn and Pb, and M3 is Cu). The film if transferred to the surface of a fixed substrate by a horizontal or perpendicular sticking method. The film on the substrate is then heat treated in the presence of oxygen to obtain a thin metal oxide film for a superconductor or the like. |