| 摘要 |
PURPOSE:To enable an operator to move a chip while observing it for positioning the chip with improved accuracy, by constructing a vacuum chuck such that the chip sucked by a suction port can be observed through a specific member. CONSTITUTION:A flat-plate-type member 1 of a material transparent to visible and infrared radiation, for example of sapphire is provided with a suction port 2 for sucking a chip 5; an exhaust port 3 formed outside a region occupied by a sucked chip and connected to an external discharge system; and a vacuum passage 4 connecting between the suction and discharge ports 3. The discharge port 3 is connected to a discharge tube 6 to draw a vacuum. A vacuum chuck thus constructed allows an operator to observe a chip being sucked by the suction port, through the member 1. Accordingly, the operator can position the chip at a predetermined position with desirable positional accuracy.
|
