| 摘要 |
PURPOSE:To stably form films of a uniform thickness by sputtering for a long time by forming a target used with a rare earth metal having columnar crystals so arranged that the longitudinal direction of the crystals is made perpendicular to the surface of the target to be sputtered. CONSTITUTION:A target for sputtering is formed with a rare earth metal having columnar crystals so arranged that the longitudinal direction of the crystals is made perpendicular to the surface of the target to be sputtered. The rare earth metal is selected among the lanthanoids having atomic number 57-71, yttrium and scandium and the diameter of the columnar crystals is regulated to <=about 400mum, preferably <=150mum. By the specified crystal arrangement, a film of a uniform thickness can stably be formed by sputtering with the target.The target is suitable for use in the production of a magneto-optical disk or the like. |
